Selective Silicon Micromachining
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Xenon Difluoride Etching
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Isotropic silicon etching
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Selective to Si over other materials
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Dry process minimizes stiction
• X3 Series? XetchR from Xactix
Enabling Capabilities
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MEMS release w/ PolySi sacrificial
layers
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Bulk silicon micromachining
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Wafer/die/package-level process |
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If you don't find what you're looking for,
Contact Us.
We may have a suitable product that's not listed, or we may be
able to develop a material to fit your specific needs.
Tel : (02)2217-3442 / Fax : (02)2704-4070
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