Epi-ready Sapphire substrate Spec
2 inches( 50.8x0.43mm) |
Epi-ready Sapphire substrate Spec
2 inches( 50.8x0.33mm) |
|
Diam Tolerance ±0.05mm |
Diam Tolerance
±0.05mm |
|
Thickness Tolerance ±0.025mm |
Thickness Tolerance ±0.025mm |
|
Parallelism
<3
arc min. |
Parallelism
<3 arc min. |
|
Perpendicularity
<5
arc min. |
Perpendicularity
<5 arc min. |
|
Roughness
<1nm |
Roughness
<1nm |
|
Backsurface Roughness 0.4 to 1.0microns |
Backsurface Roughness 0.4 to 1.0microns |
|
Flatness
<5
µm |
Flatness
<5
µm |
|
TTV&BOW
<25
µm |
TTV&BOW
<25
µm |
|
Orientation C-axis 0001 ±0.25° |
Orientation C-axis 0001 ±0.25° |
|
ORF A-axis 11-20 ±0.3°, Length 16.0±1.0mm |
ORF A-axis 11-20 ±0.3°, Length 16.0±1.0mm |
|
Cleaning 100 grade clean room |
Cleaning 100 grade clean room |
|
Packaging Under Nitrogen |
Packaging Under Nitrogen |