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奈米壓印(nanoimprint)微影製程提供了小於5奈米(nm)的圖案解析度,而且有機會可以取代半導體元件製造上所使用的學光微影(photolithography)。
每一個奈米壓印製程,都會在基板上創造出一個模版的反向複製圖案。假如模版具有多於一層的拓墣形狀,則單一的壓印步驟即會產生多重、區分開來的層別。雖然模版的製造在多加入一層額外的層級後會變得更為困難,但對於同時壓印的層級數目並沒有特定的限制。
UV curable polymers
Thermal curable polymers
These
coating resins have low optical loss for optical communication
wavelengths, small birefringence, and excellent environmental
stability. To be used for various waveguide structures, precise
and continuous control of refractive index is available by
blending of polymer solutions with standard refractive index. To
achieve the best film quality, a nitrogen environment is
recommended during the UV exposure.
Materials - Optical Polymers
RPO designs and manufactures
high-quality IPG optical polymers with a range of optical and
physical characteristics. The IPG material system has been
benchmarked in the demanding single-mode polymer optical chip
applications and is suitable for a wide range of uses. The IPG™
resin can be supplied with or without photoinitiator and is
filtered and packed to microelectronics grade in Class 100
clean room facilities.
Optical Polymer Thin Films
RPO can spin coat IPG films onto
a range of substrates (including silicon, silica, glass and
polyimide) to produce ultra flat and ultra smooth films. These
films can be optically contacted to other substrates have
applications as spacers, isolation layers, protective barriers
and elements in hybrid integration. The IPG can also be used
as an optical cladding layer over a variety of waveguide
materials.
PLC's - Optical Polymer Chips
RPO supplies polymer optical
chips via its APIO™ process. Chip design, layout and footprint
can be customised to suit your performance, assembly and
packaging constraints. Device insertion loss is minimised by
exploiting the index contrasts attainable with IPG™ materials.
Examples of devices produced to date include: MMI splitters
(1x2 to 1x16), MMI mux/demux (1310/1550 and 1310/1490), MZIs
and Y-branch splitters.
A
unique polymer with a combination of low loss, stability and
photowritability
Market requirement
The challenge
The electrical limit
Performance and manufacturability
The optical way
Waveguide
Design in Integrated Optical
Circuits
Materials and Fabrication Techniques of
Optical
Waveguides
Glass-Waveguides on Integrated
Optical
Substrates (Part I)
Glass-Waveguides on Integrated
Optical
Substrates (Part II)
Fiber-to-Optical
waveguide
coupling techniques
Characteristics and Measurement of integrated channel waveguides.
常見問題解答關於光波導聚合物
If you don't find what you're looking for,
Contact Us.
We may have a suitable product that's not listed, or we may be
able to develop a material to fit your specific needs.
Tel : (02)2217-3442 / Fax : (02)2704-4070
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